The SCEAS System | ||||
Paper infoLeon J. P. Vogels, M. W. C. Dohmen, P. Van Duijvenboden, Robert A. Latimer, J. D. O. HeffernanA Yield Improvement Program Using Process Control and Process Optimization for Particle Reduction Using In Situ Particle Monitoring on a Semitool Magnum. [Citation Graph (0, 0)][DBLP] DFT, 1998, pp:11-16 [Conf] Scores and Rank SCEAS: 0.41721 SCEAS_PS: 0 SCEAS_BPS: 0 SCEAS_EPS: 0 SCEAS_BEPS: 0 SCEAS_B0: 3.11202 PAGE_RANK: 0.48050 HITS_H: 0 HITS_A: 0 BHITS_H: 0 BHITS_A: 0 SALSA_A: 0 SALSA_H: 0 BSALSA_A: 0 BSALSA_H: 0 P: 0 BCC: 0 citations_to_me: 0 citations_from_me: 0 Graph produced by graphviz-1.8.5 | ||||
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