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Publications of Author

1. Yaw-Jen Chang
   Fault Detection for Plasma Etching Processes Using RBF Neural Networks. [Citation Graph (0, 0)][DBLP]
   ISNN (3), 2005, pp:538-543 [Conf]
   
2. 
   Feature Extraction of Waveform Signals for Uncertain Dynamic Processes Using Neural Networks. [Citation Graph (, )][DBLP]
   
   
3. 
   Virtual Metrology Technique for Semiconductor Manufacturing. [Citation Graph (, )][DBLP]
   
   
4. 
   Process optimization based on neural network model and orthogonal arrays. [Citation Graph (, )][DBLP]