Jeng T. Sheu, Cheng C. Chen, Sun P. Yeh, Hseih T. Chou Fabrication Of Ultrahigh-Density Nano-Pyramid Arrays (Npas) On (100) Silicon Wafer Using Scanning Probe Lithography And Anisotropic Wet Etching. [Citation Graph (0, 0)][DBLP] International Journal of Computational Engineering Science, 2003, v:4, n:3, pp:695-698 [Journal]