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Noboru Nomura: [Publications] [Author Rank by year] [Co-authors] [Prefers] [Cites] [Cited by]

Publications of Author

  1. Kenji Harafuji, Akio Misaka, Noboru Nomura, Masahiro Kawamoto, Hirohiko Yamashita
    A novel hierarchical approach for proximity effect correction in electron beam lithography. [Citation Graph (0, 0)][DBLP]
    IEEE Trans. on CAD of Integrated Circuits and Systems, 1993, v:12, n:10, pp:1508-1514 [Journal]
  2. Yoshihiko Hirai, Sadafumi Tomida, Kazushi Ikeda, Masaru Sasago, Masayuki Endo, Sigeru Hayama, Noboru Nomura
    Three-dimensional resist process simulator PEACE (photo and electron beam lithography analyzing computer engineering system). [Citation Graph (0, 0)][DBLP]
    IEEE Trans. on CAD of Integrated Circuits and Systems, 1991, v:10, n:6, pp:802-807 [Journal]

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