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Edward W. Scheckler:
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Publications of Author
- Edward W. Scheckler, Andrew R. Neureuther
Models and algorithms for three-dimensional topography simulation with SAMPLE-3D. [Citation Graph (0, 0)][DBLP] IEEE Trans. on CAD of Integrated Circuits and Systems, 1994, v:13, n:2, pp:219-230 [Journal]
- Edward W. Scheckler, Nelson N. Tam, Anton K. Pfau, Andrew R. Neureuther
An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification. [Citation Graph (0, 0)][DBLP] IEEE Trans. on CAD of Integrated Circuits and Systems, 1993, v:12, n:9, pp:1345-1356 [Journal]
- Edward W. Scheckler, Alexander S. Wong, Robert K. Wang, Goodwin R. Chin, John R. Camagna, Andrew R. Neureuther, Robert W. Dutton
A utility-based integrated system for process simulation. [Citation Graph (0, 0)][DBLP] IEEE Trans. on CAD of Integrated Circuits and Systems, 1992, v:11, n:7, pp:911-920 [Journal]
- Kenny K. H. Toh, Andrew R. Neureuther, Edward W. Scheckler
Algorithms for simulation of three-dimensional etching. [Citation Graph (0, 0)][DBLP] IEEE Trans. on CAD of Integrated Circuits and Systems, 1994, v:13, n:5, pp:616-624 [Journal]
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