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Kazuko Ikeda: [Publications] [Author Rank by year] [Co-authors] [Prefers] [Cites] [Cited by]

Publications of Author

  1. Kazuko Ikeda
    Evaluation method for the control of process induced defect in deep sub-micron device fabrication. [Citation Graph (0, 0)][DBLP]
    Microelectronics Reliability, 2001, v:41, n:9-10, pp:1525-1533 [Journal]

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