Kah-Yoong Chan, Bee-San Teo Atomic force microscopy (AFM) and X-ray diffraction (XRD) investigations of copper thin films prepared by dc magnetron sputtering technique. [Citation Graph (0, 0)][DBLP] Microelectronics Journal, 2006, v:37, n:10, pp:1064-1071 [Journal]
Kah-Yoong Chan, Teck-Yong Tou, Bee-San Teo Thickness dependence of the structural and electrical properties of copper films deposited by dc magnetron sputtering technique. [Citation Graph (0, 0)][DBLP] Microelectronics Journal, 2006, v:37, n:7, pp:608-612 [Journal]