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Chuan Jie Zhong: [Publications] [Author Rank by year] [Co-authors] [Prefers] [Cites] [Cited by]

Publications of Author

  1. Chuan Jie Zhong, Hiroaki Tanaka, Shigetoshi Sugawa, Tadahiro Ohmi
    High quality silicon nitride deposited by Ar/N2/H2/SiH4 high-density and low energy plasma at low temperature. [Citation Graph (0, 0)][DBLP]
    Microelectronics Journal, 2006, v:37, n:1, pp:44-49 [Journal]

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