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Chuen-Guang Chao: [Publications] [Author Rank by year] [Co-authors] [Prefers] [Cites] [Cited by]

Publications of Author

  1. Yang-Kuao Kuo, Chuen-Guang Chao
    Control ability of spin coating planarization of resist filmand optimal control of developers. [Citation Graph (0, 0)][DBLP]
    Microelectronics Journal, 2006, v:37, n:8, pp:759-764 [Journal]
  2. Yang-Kuao Kuo, Chuen-Guang Chao
    Analysis of the effects of reflectance and refraction generated by wafers made from fused silica, ALOxNy and TiSixNy under different light sources on pattern length and best focus. [Citation Graph (0, 0)][DBLP]
    Microelectronics Journal, 2005, v:36, n:1, pp:35-39 [Journal]
  3. Yang-Kuao Kuo, Chuen-Guang Chao, Chi-Yuan Lin
    Analysis of instability line width and white wall created by the photolithography process. [Citation Graph (0, 0)][DBLP]
    Microelectronics Journal, 2004, v:35, n:11, pp:915-922 [Journal]

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