Yang-Kuao Kuo, Chuen-Guang Chao Control ability of spin coating planarization of resist filmand optimal control of developers. [Citation Graph (0, 0)][DBLP] Microelectronics Journal, 2006, v:37, n:8, pp:759-764 [Journal]
Yang-Kuao Kuo, Chuen-Guang Chao Analysis of the effects of reflectance and refraction generated by wafers made from fused silica, ALOxNy and TiSixNy under different light sources on pattern length and best focus. [Citation Graph (0, 0)][DBLP] Microelectronics Journal, 2005, v:36, n:1, pp:35-39 [Journal]