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Sohan Singh Mehta: [Publications] [Author Rank by year] [Co-authors] [Prefers] [Cites] [Cited by]

Publications of Author

  1. Sohan Singh Mehta, Navab Singh, Moitreyee Mukherjee-Roy, Rakesh Kumar
    Placement of scattering bars in binary and attenuated phase shift mask for damascene trench patterning. [Citation Graph (0, 0)][DBLP]
    Microelectronics Journal, 2004, v:35, n:7, pp:621-626 [Journal]
  2. Sohan Singh Mehta, Sun Hai Qin, Moitreyee Mukherjee-Roy, Navab Singh, Rakesh Kumar
    Resist pattern peeling assessment in DUV chemically amplified resist. [Citation Graph (0, 0)][DBLP]
    Microelectronics Journal, 2004, v:35, n:5, pp:427-429 [Journal]
  3. Moitreyee Mukherjee-Roy, Navab Singh, Sohan Singh Mehta, G. S. Samudra
    A new approach for eliminating unwanted patterns in attenuated phase shift masks. [Citation Graph (0, 0)][DBLP]
    Microelectronics Journal, 2003, v:34, n:10, pp:965-967 [Journal]
  4. Navab Singh, Moitreyee Mukherjee-Roy, Sohan Singh Mehta
    Defocusing image to pattern contact holes using attenuated phase shift masks. [Citation Graph (0, 0)][DBLP]
    Microelectronics Journal, 2003, v:34, n:4, pp:237-245 [Journal]

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