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F. Marty: [Publications] [Author Rank by year] [Co-authors] [Prefers] [Cites] [Cited by]

Publications of Author

  1. F. Marty, L. Rousseau, B. Saadany, B. Mercier, O. Français, Y. Mita, T. Bourouina
    Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures. [Citation Graph (0, 0)][DBLP]
    Microelectronics Journal, 2005, v:36, n:7, pp:673-677 [Journal]

  2. Electrostatically-Driven Resonator on Soi with Improved Temperature Stability [Citation Graph (, )][DBLP]


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