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Guizhen Yan: [Publications] [Author Rank by year] [Co-authors] [Prefers] [Cites] [Cited by]

Publications of Author


  1. The method of prevent footing effect in making SOI micro-mechanical structure. [Citation Graph (, )][DBLP]


  2. An improved method to remove anti-footing Al layer after DRIE. [Citation Graph (, )][DBLP]


  3. Performance comparison of methods to evading notching effect for SOG structures in DRIE. [Citation Graph (, )][DBLP]


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